| Elements | Atomic Numbers 22(Ti) to 83(Bi) |
| X-ray source | Air-cooled small X-Ray Tube Voltage : 50 Kv Current:1 mA |
| Detector | Proportional Counter |
| Collimator | Round. 0.1 mm, 0.2 and two other types |
| Sample Observation | CCD camera (with wide view system) |
| Sample image focus | Laser Pointer |
| Filter | Primary filter automatic switching |
| Sample Stage | [Stage size] 500(W)×400(D)×150(H) mm [Traveling] X : 250 mm, Y : 200 mm |
| Controller | Desktop Computer with 19 inch LCD Monitor |
| Application Software | Thin Film FP (All types of thin films: Max 5 layers,10 elements per layer), Calibration |
| Data Process | Microsoft Excel, Microsoft Word |
| Safety Functions | Sample door interlock, Sample crash prevention mechanism, Diagnostic Function |
