| Stroke (X x Y x Z) | 300 x 300 x 150 mm |
| Minimum readout | 0.01 µm |
| Maximum workpiece weight | 30 kg (Accuracy guaranteed: 10kg) |
| Maximum permissible error (for samples under 20kg) | EUX,MPE EUY,MPE: 0.6+2L/1000 μm EUXY, MPE: 0.9+3L/1000 μm EUZ,MPE: 0.9+L/150 μm |
| Accuracy guarantee temperture | 20 °C ± 0.5 K |
| Maximum driving speed XY,Z | 100 mm/s, 50mm/s |
| Minimum driving speed XY,Z | 0.01 mm/s, 0.001 mm/s |
| Camera | VGA 1/3" B/W, Color, XGA 1/3" B/W, Color * Color camera option is available only with Type 1,2 and 3 |
| Working distance | Type 1/2/3: 50 mm (10mm when using with 75° LED illumination), Type 4: 30mm Type TZ: 31 mm ( low magnification), 11 mm ( high magnification) |
| Magnification and FOV | Type 1: 0.5~7.5x/ 9.33x7.01~0.622x0.467 mm Type 2: 1~15x/ 4.67x3.5-0.311x0.233 mm Type 3: 2~30x/ 2.33x1.75~0.155x0.117 mm Type 4: 4~60x/ 1.165x0.875~0.078x0.058 mm Type TZ: 1~120x/ 4.67x3.5~0.039x0.029 mm |
| Auto focus | TTL laser AF/ Image AF. |
| Illumination | Type 1,2,3,4: Episcopic, diascopic, and 8- segment ring with 3 angles * All white LED/ Type 4 has only 1 angle Type TZ: Episcopic, diascopic, darkfield |
| Power source | AC 100-240V 50/60Hz |
| Power consumption | 5A-2.5A |
| Dimensions & weight (W x D x H) | Main unit & table: 1000 x 1125 x 1750 mm / 500 kg (approx 500 kg) |
| Controller: 190 x 450 x 440 / 15 kg (approx 20 kg) | |
| Footprint | 3000x2800 mm |
